Vacuum Electronic Engineering

Numbering Code U-ENG26 36117 LJ72 Year/Term 2022 ・ First semester
Number of Credits 2 Course Type Lecture
Target Year Target Student
Language Japanese Day/Period Thu.1
Instructor name GOTOU YASUHITO (Graduate School of Engineering Associate Professor)
Outline and Purpose of the Course Vacuum Electronic Engineering deals with the devices that exhibit some functions by controlling the motion of the electrons (or charged particles) with electromagnetic fields. High power and high frequency vacuum tubes and ion implantation system that is used for impurity introduction to semiconductors are based on the theory of vacuum electronic engineering. This course explains fundamentals of the electron motion in vacuum and fundamentals on the control of electron beams are given; extraction of electrons from solid to vacuum, electron optics, and electron devices.
Course Goals To understand the methods to extract electrons from solids, methods to control the electrons by electro-magnetic fields, and operational principle of the vacuum devices.
Schedule and Contents [Introduction to Vacuum Electronic Engineering] Once
Application field of the vacuum electronic engineering will be shown.

[Extraction of electrons from solid to vacuum] 4 times
The mechanism of thermionic and field emission, which are mostly used to extract electrons in solids to vacuum, will be described in detail. The formula of the extractable current density for each mechanism will be presented, explaining the effects of image force and space charges.

[Motion of electrons in electromagnetic fields and its control] 5 times
The electron trajectories in electrostatic, magnetostatic, and orthogonal electromagnetic fields will be described. Lens effects of the electrostatic and magnetostatic fields will also be described, and concrete idea for application of these effects to practical devices will be presented.

[Electron beam devices] 4 times
Operational principle of the electron devices based on electron beams, namely vacuum tubes, will be described. Especially, principles of a velocity modulation tube will be presented, showing the advantage of vacuum electron devices for high power and high frequency application.

[Feedback] Once
Summarizing the above contents, degree of understanding will be evaluated.
Evaluation Methods and Policy In principle, grading will be done with the result of the term-end examination.
Occasionally, some exercises may be given in the class, and submission of short reports may be taken into consideration to the evaluation.
Course Requirements Fundamental knowledge on electromagnetic theory, dynamics, electrons in solids, and electric and electronic circuits is necessary.
Study outside of Class (preparation and review) Necessary preparation will be shown at the end of each lecture.

[Extraction of electrons from solid to vacuum]
(In preparation) Review the band structure, density of states of electrons in solids, etc. that you leaned at "Fundamentals of Electron Physics and Devices" in the 2nd grade. Review the Poisson's equation, image charge method, etc. that you learned at "Electromagnetic Theory 1" in the 2nd grade.

[Motion of electrons in electromagnetic fields and its control]
(In preparation) Review the equations of motion of charged particles in electromagnetic fields that you are learning at "Electromagnetic Theory 2" in the 3rd grade.

[Electron beam devices]
(In preparation) Review the operating principle of semiconductor transistors and their equivalent circuits that you learned at "Electronic Circuits" in the 2nd grade.
Textbooks Textbooks/References No textbook will be used, but supplemental materials may be distributed in some cases.
References, etc. Fundamentals of Material Science and Engineering, Tetsuro Tanaka, (Asakura), ISBN:978-4-254-21003-3
Science and Technology of Charged Particle Beams, Zyunzo Ishikawa, (Corona), ISBN:978-4-339-00734-3
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