ILAS Seminar-E2 :How to make nano-machines
| Numbering Code | U-LAS70 10002 SE50 | Year/Term | 2022 ・ First semester |
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| Number of Credits | 2 | Course Type | seminar |
| Target Year | Mainly 1st year students | Target Student | For all majors |
| Language | English | Day/Period | Fri.5 |
| Instructor name | BANERJEE, Amit (Graduate School of Engineering Senior Lecturer) | ||
| Outline and Purpose of the Course |
Nanotechnology is about to revolutionarize human society. If you are curious about how nano-machines are being developed, this seminar course will be very informative. One of the greatest technological achievements of past few decades is our ability to make micro-meter scale 'machines'. These machines have become ubiquitous in our daily life, giving functional capabilities to our smart-phones, cars, digital projectors, medical devices, etc. In this technological revolution of extreme 'shrinking' of machines, we have entered an era where machines of only a few thousand atoms wide can be built. Have you ever wondered how do we build such small machines and make them function desirably in such small scale? In this seminar course, I will reveal the tricks of the trade of fabricating micro / nanoscale machines. I will also elaborate the underlying physics (working principles) of micro / nano machines. This seminar course is based on my own research area, so I can show you pictures and videos of actual micro / nano machine fabrication and operation that I collect during my own research in Kyoto University. |
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| Course Goals | Students will learn about micro- and nano-scale machines (electro-mechanical systems): how they work, how they are made, and their amazing applications. | ||
| Schedule and Contents |
1. Why do we want to make nano-machines? Introduction to micro / nano machines, miniaturization of device; MEMS, NEMS, and their advantages, examples of common MEMS / NEMS and their applications (2 weeks) 2.Building blocks of micro / nano machines: actuators and sensors (1 week) 3. Actuators, types and working principles, efficacy and applications (2 weeks) 4. Sensors of motion (accelerometer, gyroscope, etc.), and environment (pressure, temperature, etc.) (2 weeks) 5. Micro / Nano machine design and simulation, CAD design and finite element analysis (2 weeks) 6. Microfabrication, basic concepts and methods, fabrication schemes (1 week) 7. Photolithography - principle and limitations (1 week) 8. Electron beam lithography - principle and limitations (1 week) 9. Current trend and futuristic MEMS / NEMS technology (2 weeks) 10. Feedback (1 week) |
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| Evaluation Methods and Policy | Active participation (10%), submission of a final report (topics will be discussed during the lecture) (90%) | ||
| Course Requirements | None | ||
| Study outside of Class (preparation and review) | Following lecture materials and reading recommended articles / notes | ||
